| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of reliably removing residual charge accumulated in a substrate.SOLUTION: An electrostatic chuck C of the present invention has heating members 4 arranged on one side of a substrate 1, and electrodes 2 arranged on the other side of the substrate 1. The electrostatic chuck C further includes an insulating layer 5 provided to cover the heating members 4, electrodes 2, and substrate 1 except one or a plurality of portions on the surface of the substrate 1; and an electrically grounded conductive member 7 that is fixed to the surface of the substrate 1 not covered with the insulating layer 5. |
