A METHOD OF NANOCRYSTALLINE CLUSTER FORMATION ON WATER SOLUBLE MATERIALS BY USING MAGNETRON SPUTTERING

摘要

The invention describes a method of nanocrytalline cluster formation on water soluble materials by using magnetron sputtering. The described method differs by using magnetron sputtering in reactive (Ar:O2) atmosphere for the synthesis of nanocrystalline oxide based clusters on water soluble materials, eg. salt crystals. Geometrical size of the obtained nanocrystalline clusters correlate with the size of the used salt crystals: the larger the salt crystals – the larger the nanocrystalline cluster size. When larger amounts of working gas are used during synthesis (working pressure change from 1 ×10-2 mbar up to 1 ×10-1 mbar) crystallite size increases and vice versa when smaller working pressure is used crystallite size increases. The increase of magnetron power density from 1W/cm2 up to 5W/cm2 increases deposition rate and rise the crystalinity of the synthesised clusters. In order to obtain high purity nanocrystalline materials clean (99.99 % and higher purity) salts has to be used a substrates.