| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, and the catalyst-free substrate grown graphene. The manufacturing method of catalyst-free substrate grown graphene of the present invention comprises the following steps: (a) arranging a metal layer on a substrate; (b) providing etching gas and carbon-containing gas, and conducting electron cyclotron resonance plasma enhanced-chemical vapor deposition (ECR-CVD); (c) supplying the etching gas for the catalyst-free layer when supplying the carbon-containing gas, and growing graphene on the catalyst-free layer; and (d) continuously conducting ECR-CVD from the process of step c, and growing graphene on the substrate without the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |
