发明名称 ダイヤモンド合成方法およびダイヤモンド合成装置
摘要 PROBLEM TO BE SOLVED: To provide a device for synthesizing diamond, capable of synthesizing high quality and highly reliable diamond at a high speed by a device and method which are more inexpensive than the conventional art.SOLUTION: A device 10 for synthesizing diamond includes: a reactor 1 capable of achieving a vacuum state of 100 Pa or below; a cathode 3A and an anode 3B provided in the reactor 1; an arc source 7 for generating arc discharge between both electrodes 3A and 3B; and a substrate 2 irradiated with ionized carbon generated from the electrodes. At least one of both electrodes 3A and 3B is a carbon source. Accordingly, diamond can be synthesized on the substrate 2 easily and at a high speed without using carbon-containing gas or a carbon-containing liquid.
申请公布号 JP5963132(B2) 申请公布日期 2016.08.03
申请号 JP20120116559 申请日期 2012.05.22
申请人 独立行政法人国立高等専門学校機構 发明人 齊藤 貴之
分类号 C23C14/32;C23C14/06 主分类号 C23C14/32
代理机构 代理人
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