| 摘要 |
PROBLEM TO BE SOLVED: To provide a phononic waveguide which is compatible with a mechanical element and in which mechanical oscillation propagating wave can be controlled spatially and kinetically.SOLUTION: A phononic waveguide comprises a substrate (100), a waveguide part (108) which is arranged with a space between the substrate (100) and is constituted by a thin film of a piezoelectric material, a supporting part (101) which is formed on the substrate (100) and supports the waveguide part (108) from the direction vertical to the propagation direction of mechanical oscillation, and a membrane mechanical oscillator (110) which is constituted by a thin film that is arranged to couple with the waveguide part (108). Plural holes (106a) are formed in the waveguide part (108), and the waveguide part (108) is arranged along the aligning direction of the holes (106a). |
