发明名称 微分干渉コントラスト像の生成のためのアセンブリ
摘要 An assembly for the generation of a differential interference contrast image (DIC) of an object in an imaging plane, comprising a radiation source; a Köhler illuminating optical assembly for illuminating the object with light from the radiation source; an objective for imaging the object plane in an imaging plane, wherein the objective is provided with an exit pupil and an entrance pupil, and wherein the entrance pupil of the objective is positioned in the illuminating pupil of the Köhler illuminating optical assembly; and a component for the generation of an interference is characterized in that the component for the generation of an interference is positioned in the exit pupil of the objective, and the component for the generation of an interference is formed by an amplitude filter with an amplitude transmission factor FDIC(x,y), which complies with the equation: 2 · F DIC ⁡ ( x , y ) = F + ⁡ ( x , y ) · ⅇ + ⅈ ⁢ ⁢ P 0 + F - ⁡ ( x , y ) = 2 · T 0 · cos ⁡ ( P max ⁡ ( - x · sin ⁢ ⁢ &phgr; + y · cos ⁢ ⁢ &phgr; ) + P 0 2 ) · ⅇ + ⅈ ⁢ P 0 2 wherein FDIC(x,y) is a functional expression for the description of the amplitude filter transmission and the phase of the amplitude filter depending on the coordinates x and y.
申请公布号 JP5965476(B2) 申请公布日期 2016.08.03
申请号 JP20140511789 申请日期 2012.03.28
申请人 ハー・エス・エー・ベー・ドレスデン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングHSEB DRESDEN GMBH 发明人 シュミット,クリスティーネ
分类号 G02B21/06 主分类号 G02B21/06
代理机构 代理人
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