| 摘要 |
Disclosed is a substrate supplying and withdrawing device for automatic optical inspection equipment capable of supplying substrates to the inspection equipment to inspect the substrates received in baskets and collecting the substrates which the inspection thereof is completed back in the baskets. According to the present invention, a basket supply-withdrawal unit capable of supplying and withdrawing the baskets to stably and accurately insert the substrates at a preset location and to preset an interval between the substrates, which are received in the baskets by a sheet, narrower at the same time is formed in a single line. Accordingly, a supply unit and a withdrawal unit can be integrally operated by receiving the substrates which the inspection is completed back in the baskets. In addition, an installation space of the device can be reduced by more than half. Moreover, the number of the baskets in operation can be reduced by more than half. |
