发明名称 |
半導体基板上での逆相境界の無いIII−V化合物半導体材料およびその製造方法 |
摘要 |
Method for manufacturing a III-V compound semiconductor material comprising: providing a substrate made of a first semiconductor material having a {001} orientation, an insulating layer overlying and in contact with the substrate and a recessed region in the insulating layer which exposes the substrate; forming a buffer layer of a group IV semiconductor material overlying and in contact with the exposed substrate in the recessed region; applying a thermal treatment at a temperature higher or equal to a roughening temperature of the group IV semiconductor for roughening the surface of the buffer layer, such that the buffer layer takes a rounded shape having a double stepped surface; and filling at least partially the recessed region with a III-V compound semiconductor material which is overlying and in contact with the double stepped surface of the buffer layer. |
申请公布号 |
JP5954944(B2) |
申请公布日期 |
2016.07.20 |
申请号 |
JP20110171715 |
申请日期 |
2011.08.05 |
申请人 |
アイメックIMEC;カトリーケ・ユニフェルシテイト・ルーヴァンKatholieke Universiteit Leuven |
发明人 |
ワン・ガン;マッティ・カイマックス;マールテン・レイス;ウェイ−イー・ワン;ニアム・ウォルドロン |
分类号 |
H01L21/20;C23C16/30;C23C16/56;H01L21/205 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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