发明名称 フォトレジスト製造用溶剤または溶剤組成物、及びフォトレジスト製造用組成物
摘要 PURPOSE: A method for manufacturing a photoresist manufacturing composition is provided to dissolve the high concentration of an oxime ester-based photo polymerization initiator in the process of manufacturing a photoresist. CONSTITUTION: A method for manufacturing a photoresist manufacturing composition includes the following: a solvent composition is obtained by mixing an oxime ester-based photo polymerization initiator and a first solvent with at least one selected from a group including compounds represented by chemical formulas A1 to A5; the photoresist manufacturing composition is obtained by mixing the solvent composition and a second solvent which is miscible with the first solvent.
申请公布号 JP5946657(B2) 申请公布日期 2016.07.06
申请号 JP20120049823 申请日期 2012.03.06
申请人 株式会社ダイセル 发明人 鈴木 陽二;赤井 泰之
分类号 G03F7/004;G03F7/031 主分类号 G03F7/004
代理机构 代理人
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