SENSOR MODULE AND METHOD FOR PRODUCING SENSOR MODULE

摘要

A detector provided on a flat portion of a diaphragm includes a plurality of strain gauges, resistor element connectors connecting adjacent ones of the strain gauges, and an electric conductor covering a part of the resistor element connectors. First linear portions and second linear portions of the resistor element connectors exposed from the electric conductor are orthogonal to the edges of the electric conductor extending across the first linear portions and the second linear portions. Even when a pattern of the resistor element connector and a pattern of electric conductor are misaligned in X direction or in Y direction, an area of the resistor element connector exposed from the electric conductor does not change.

主权项

1. A sensor module comprising:
a diaphragm; and a detector provided to a flat portion of the diaphragm to detect a pressure, wherein, the detector comprises a plurality of strain gauges each configured to detect a strain, a resistor element connector connecting adjacent ones of the strain gauges, and an electric conductor covering a part of the resistor element connector, and the resistor element connector comprises a linear portion partially exposed from the electric conductor, the linear portion extending in a first direction orthogonal to an edge of the electric conductor extending across the linear portion.