发明名称 マッチング処理装置、マッチング処理方法、及びそれを用いた検査装置
摘要 An inspection device that performs pattern matching on a searched image performs matching between a template image of an inspection object and the searched image by using: a feature region extraction process unit that extracts a feature quantity from the template image acquired for learning; a feature quantity extraction process unit that extracts a feature quantity from the searched image acquired for learning; a mutual feature quantity calculation process unit that calculates a mutual feature quantity of the template image and the searched image from the feature quantity extracted from the template image and the feature quantity extracted from the searched image; a learning process unit that calculates, using a plurality of the mutual feature quantities, a discrimination boundary surface that determines matching success or failure; a process unit that calculates a plurality of the mutual feature quantities from an image acquired from the inspection object; and the plurality of mutual feature quantities and the discrimination boundary surface. Thus, an inspection device can be provided that outputs an accurate matching position in template matching even when there is a large apparent image discrepancy between the template and the searched image.
申请公布号 JP5941782(B2) 申请公布日期 2016.06.29
申请号 JP20120167363 申请日期 2012.07.27
申请人 株式会社日立ハイテクノロジーズ 发明人 長友 渉;安部 雄一;牛場 郭介
分类号 G06T7/00;G01B15/00;G01N21/956 主分类号 G06T7/00
代理机构 代理人
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