COBALT-CARBON EUTECTIC METAL ALLOY OHMIC CONTACT FOR CARBON NANOTUBE FIELD EFFECT TRANSISTORS

摘要

A cobalt-carbon (Co-C) eutectic metal alloy ohmic contact for a radio-frequency (RF) carbon nanotube (CNT) field effect transistor (FET) device and a method of manufacturing same are disclosed. Embodiments of a method include providing a graphite crucible, placing Co and a C source within the graphite crucible, heating the graphite crucible containing the Co and C source such that the Co and C source combine with graphite from the graphite crucible to thereby form a Co-C eutectic metal alloy, and creating an ohmic contact by depositing the Co-C eutectic metal alloy directly on top surfaces of CNTs of a RF CNT FET device such that the Co-C eutectic metal alloy is in direct contact with the CNTs. The Co-C eutectic metal alloy ohmic contact formed in this manner is consistently stabile and uniform and functions as a high work function layer that also serves as an adhesion layer to the CNTs.