发明名称 角速度検出素子
摘要 A vibrating body of an angular velocity detection element includes detection beams extending in a cross shape from a central base and external connection beams and internal connection beams connected between adjacent detection beams. The detection beams each include a base end detection beam that is connected to the central base and a central detection beam, a left detection beam and a right detection beam that define three prongs. The central detection beam is connected to the external connection beams on both sides, the left detection beam is connected to the internal connection beam on the left side and the right detection beam is connected to the internal connection beam on the right side. The adjacent external connection beams undergo driven vibration so as to be displaced in directions so as to have mirror relationships with each other with the detection beams interposed between the external connection beams acting as boundaries therebetween.
申请公布号 JP5935901(B2) 申请公布日期 2016.06.15
申请号 JP20140551997 申请日期 2013.12.04
申请人 株式会社村田製作所 发明人 渡辺 恒介
分类号 G01C19/56 主分类号 G01C19/56
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