| 发明名称 |
DIAMOND SEMICONDUCTOR ELEMENT AND PROCESS FOR PRODUCING THE SAME |
| 摘要 |
A process for producing a diamond thin-film comprises a first process-step of forming a diamond crystal thin-film on a substrate, a second process-step of putting two of said diamond crystal thin-film thus formed in readiness, and a third process-step of firing said two diamond crystal thin-films, superimposed each other such that surfaces of the two diamond crystal thin-films make at least partial contact with each other, under a high pressure under which a diamond is stable. |
| 申请公布号 |
EP1895579(B1) |
申请公布日期 |
2016.06.15 |
| 申请号 |
EP20060766995 |
申请日期 |
2006.06.20 |
| 申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
KASU, MAKOTO;MAKIMOTO, TOSHIKI;UEDA, KENJI;YAMAUCHI, YOSHIHARU |
| 分类号 |
C23C16/27;C30B25/10;C30B29/04;C30B33/02;C30B33/06;H01L21/02;H01L21/04;H01L21/324;H01L21/331;H01L21/336;H01L21/338;H01L29/04;H01L29/16;H01L29/45;H01L29/66;H01L29/73;H01L29/732;H01L29/78;H01L29/786;H01L29/812;H01L33/00 |
主分类号 |
C23C16/27 |
| 代理机构 |
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