发明名称 強誘電体薄膜形成用組成物及びその薄膜の形成方法
摘要 [Task] Cracking does not occur in a ferroelectric thin film even when Ce is not doped in a composition for forming ferroelectric thin films and a composition for forming relatively thick ferroelectric thin films contains lead acetate instead of lead nitrate. [Means for Resolution] A ferroelectric thin film made of a titanate lead-based perovskite film or a titanate zirconate lead-based complex perovskite film is formed using the composition for forming ferroelectric thin films. The composition includes lead acetate, a stabilizing agent made of lactic acid and polyvinyl pyrrolidone. In addition, a monomer-equivalent molar ratio of polyvinyl pyrrolidone to a perovskite A site atom included in the composition is more than 0 to less than 0.015. Furthermore, a weight average molecular weight of the polyvinyl pyrrolidone is 5000 to 100000.
申请公布号 JP5929654(B2) 申请公布日期 2016.06.08
申请号 JP20120199472 申请日期 2012.09.11
申请人 三菱マテリアル株式会社 发明人 藤井 順;桜井 英章;曽山 信幸
分类号 H01L21/316;H01G4/33;H01L21/336;H01L21/8246;H01L27/105;H01L29/78;H01L41/08;H01L41/09;H01L41/18;H01L41/318;H01L41/43 主分类号 H01L21/316
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