| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical liquid volatilizer allowing facile replenishment of a chemical liquid into a chemical liquid container without detaching a wick member from the chemical liquid container, and furthermore preventing that the chemical liquid flows out to the outside even when the chemical liquid container has fallen. <P>SOLUTION: This chemical liquid volatilizer includes: the chemical liquid container 2; the wick member 3 sucking and volatilizing the chemical liquid; and a holding member 4 provided in an upper opening 20 of the chemical liquid container 2, and holding the wick member 3 in a state that an upper end part of the wick member 3 is exposed upward. The holding member 4 includes: a plug part 43 formed of a flexible material, and closing the upper opening 20; a holding part 44 holding the wick member 3; at least one inlet 45 which is formed in the plug part 43, and through which the chemical liquid can be injected into the chemical liquid container 2; and an elastic piece 46 integrally formed in the plug part 43, and openably closing the inlet 45 by elastic force. <P>COPYRIGHT: (C)2013,JPO&INPIT |
