TRACE CARBON QUANTITATIVE ANALYZER AND TRACE CARBON QUANTITATIVE ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a trace carbon quantitative analyzer and a trace carbon quantitative analysis method which enable analysis of trace carbon in a sample without the influence by contamination.SOLUTION: A trace carbon quantitative analyzer comprises: a sample chamber to be evacuated to create a vacuum therein; a liquid nitrogen trap for trapping a residual gas in the sample chamber by liquid nitrogen cooling; a plasma/oxygen radical generator for blowing plasma or oxygen radical against a surface of a sample in the sample chamber and the inside of the sample chamber; an electron source for generating an electron beam; a lens unit for focusing the generated electron beam; a scan driving unit for performing operations including scanning, by the focused electron beam, the sample in the sample chamber; and two or more carbon detectors provided for detecting characteristic X-rays of carbon emitted from the sample irradiated with the electron beam. The trace carbon quantitative analyzer determines the quantity of trace carbon in the sample in the sample chamber from the carbon characteristic X-rays detected by the two or more carbon detectors.SELECTED DRAWING: Figure 1