OPTICAL STRUCTURE WITH RIDGES ARRANGED AT THE SAME AND METHOD FOR PRODUCING THE SAME

摘要

An apparatus having an optical structure and ridges is described, wherein the ridges connect the optical structure to a supporting structure and wherein the optical structure is able to perform a movement in relation to a reference plane.

主权项

1. Apparatus comprising:
an optical structure; at least two ridges, each connecting the optical structure to a supporting structure; wherein the ridges are implemented to effect, by heating the ridges, deformation of the ridges and a movement of the optical structure with regard to a reference plane; wherein the at least two ridges comprise a first layer and a second layer that are deflectable differently in relation to one another; wherein the optical structure comprises a layer, wherein the layer of the optical structure and the first layer of the ridges are formed of the same material; wherein the optical structure comprises a further layer, wherein the further layer of the optical structure and the second layer of the ridges are formed of the same material; wherein the layer of the optical structure and the first layer of the ridges are integrated and the further layer of the optical structure and the second layer of the ridges are integrated; wherein the supporting structure comprises a portion of the ridge material, wherein the movement of the optical structure with regard to the reference plane counteracts a thermally induced change of an optical characteristic of the optical structure; and wherein the first layer and the second layer comprise different coefficients of thermal expansion.