发明名称 MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measurement device that allows a relative position of a measurement head with respect to a measurement portion of a measurement object to accurately and easily adjusted regarding a measurement device using measurement means having the measurement head.SOLUTION: A measurement device unit 1A measuring a dimension of a measurement object W1 comprises: a measurement base 10 that arranges the measurement object W1; an air micrometer 20 that has an air jet nozzle 21; a drive cylinder 31 that moves the air jet nozzle 21 in a direction where a dimension displacement displaces for arranging the air jet nozzle 21 and the measurement object W1 at a prescribed position relation; a first engaging part 30A that corresponds to the air jet nozzle 21; and a second engaging part 10A that corresponds to the measurement base 10. The first engaging part and the second engaging part abut against each other in the dimension displacement direction, which in turn the relative position between the measurement base 10 and the air jet nozzle 21 is set to a prescribed dimension.SELECTED DRAWING: Figure 5
申请公布号 JP2016099128(A) 申请公布日期 2016.05.30
申请号 JP20140233684 申请日期 2014.11.18
申请人 TOKYO SEIMITSU CO LTD 发明人 OGIWARA SHUNSUKE
分类号 G01B21/00;G01B5/00;G01B13/02 主分类号 G01B21/00
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