| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying and processing apparatus capable of processing a substrate with a carrying position being stabilized by suppressing the disturbance of tension generated in the substrate, in a roll-to-roll substrate processing apparatus.SOLUTION: In a substrate carrying and processing apparatus, a substrate processing part includes a main roll part and a sub-roll part between which a substrate 2 is stretched a plurality of times and which forms a substrate parallel-traveling part where a plurality of substrates 2 travel. The main roll part and the sub-roll par respectively include a plurality of individual main rolls 51a and a plurality of individual sub-rolls 52a. The plurality of individual main rolls 51a are arranged so that the directions of their rotation axes are the same and so that their arrangement direction is the direction of the rotation axes, and each can rotate independently. In the plurality of individual sub-rolls 52a, their arrangement directions are arranged parallel to the direction of the rotation axis of the main roll part. The rotation axes of the individual sub-rolls 52a are arranged to be inclined with respect to the direction of the rotation axis of the main roll part, and each individual sub-roll 52a can rotate independently. The plurality of individual main rolls 51a includes individual main rolls 51a freely rotating without transmission of a drive force from a drive device 54.SELECTED DRAWING: Figure 3 |
