| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, and a manufacturing apparatus of catalyst-free substrate grown graphene. More particularly, the manufacturing method of catalyst-free substrate grown graphene grows graphene on a substrate without including a catalyst layer by conducting plasma-enhanced chemical vapor deposition (PECVD) while supplying carbon-containing gas. The manufacturing apparatus of catalyst-free substrate grown graphene comprises a solenoid spraying system which sequentially performs: (1) charging electricity; (2) operating a piezo actuator; (3) increasing hydraulic pressure of a hydraulic pressure coupler; (4) opening a pressure control valve; (5) opening a needle; and (6) spraying gas. |
