发明名称 ELASTIC WAVE DEVICE
摘要 In an elastic wave device, a plurality of elastic wave elements that include IDT electrodes are provided on a piezoelectric substrate, and a support layer that surrounds the elastic wave elements is provided on the piezoelectric substrate to define hollow portions in which the elastic wave elements are located. A cover member is stacked on the support layer, so that the hollow portions, in which the elastic wave elements are located, are provided, and the support layer includes a first support layer and a second support layer. The first support layer extends along an outer peripheral edge of the piezoelectric substrate, and the second support layer is located in a region surrounded by the first support layer and disposed around the elastic wave elements so as to have the hollow portions, in which the elastic wave elements are located. A hollow path is provided between the first support layer and the second support layer and arranged to allow communication between at least two of the hollow portions.
申请公布号 US2016149557(A1) 申请公布日期 2016.05.26
申请号 US201615011864 申请日期 2016.02.01
申请人 Murata Manufacturing Co., Ltd. 发明人 HIRA Mitsuyoshi;KAI Seiji
分类号 H03H9/72;H03H9/64 主分类号 H03H9/72
代理机构 代理人
主权项 1. An elastic wave device comprising: a piezoelectric substrate; a plurality of elastic wave elements provided on the piezoelectric substrate and each of which includes at least one IDT electrode; a support layer that is disposed outside regions in which the elastic wave elements are provided on the piezoelectric substrate to define hollow portions in portions in which the elastic wave elements are provided; and a cover member that seals the portions in which the elastic wave elements are provided, and that is stacked on the support layer to define the hollow portions; wherein the support layer includes: a first support layer that is disposed along an outer peripheral edge of the piezoelectric substrate; anda second support layer that is disposed in a region surrounded by the first support layer to surround the portions in which the elastic wave elements are provided; wherein a hollow path is provided between the first support layer and the second support layer; and the hollow path enables between at least two of the hollow portions.
地址 Nagaokakyo-shi JP