METHODS OF ON-ACTUATOR TEMPERATURE MEASUREMENT

摘要

The present invention provides methods for on-actuator temperature measurement and temperature control, including where one or more of the temperature sensors are combined with one or more heaters that are formed of wiring traces and/or providing heaters designed for one-to-one correspondence to the temperature sensors to form temperature sensor-heater pairs. The present invention also provides methods for on-actuator temperature measurement and temperature control in which the temperature sensors comprise a connection comprising a plurality of terminals by which an amount of current can be applied and then a voltage measured, wherein the voltage that is measured across the temperature sensors can be accurately correlated to a temperature.