懸架式ボロメータマイクロプレートに基づく赤外線検出器

摘要

The detector has a matrix of bolometric micro plates (14) suspended above a substrate (16) by a thermal insulation and support arm (18) for detecting radiation. A metallic focusing membrane (22) is placed above and around each micro-plate, and openings i.e. slots (26), are formed on the membrane. The openings of the membrane are placed periodically along a predetermined axis according to period less than or equal to ratio of wavelength of range of wavelengths to be detected and average refractive index of medium separating the micro-plate and the membrane.