| 发明名称 |
SUBSTRATE HOLDER, PLASMA REACTOR AND METHOD FOR DEPOSITING DIAMOND |
| 摘要 |
A substrate holder having a base plate where a plurality of protruding poles is arranged, said poles spaced apart from one another by intermediate spaces. Alternatively or in addition, a plasma reactor for depositing diamond from the gas phase may be provided, the plasma reactor comprising such a substrate holder. A method for depositing diamond from the gas phase may be provided. |
| 申请公布号 |
US2016138189(A1) |
申请公布日期 |
2016.05.19 |
| 申请号 |
US201514937359 |
申请日期 |
2015.11.10 |
| 申请人 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. |
发明人 |
NEBEL Christoph E.;MÜLLER-SEBERT Wolfgang;WIDMANN Claudia;HEIDRICH Nicola;SCHREYVOGEL Christoph |
| 分类号 |
C30B25/12;C23C16/27;C23C16/458;C30B25/20;C30B29/04 |
主分类号 |
C30B25/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Substrate holder having a base plate, wherein a plurality of protruding poles is arranged on the base plate, said poles being spaced apart from one another by intermediate spaces. |
| 地址 |
Munich DE |
