SYSTEMS AND METHODS FOR CONTROLLING A PLASMA EDGE REGION
摘要
Systems and methods for controlling a plasma edge region are described. One of the systems includes a top electrode and a bottom electrode. The system also includes an upper electrode extension and a lower electrode extension. At least a portion of the plasma edge region is formed between the upper electrode extension and the lower electrode extension. The system includes a circuit to control a radio frequency signal at the upper electrode extension.
申请公布号
WO2013078368(A3)
申请公布日期
2016.05.19
申请号
WO2012US66333
申请日期
2012.11.21
申请人
LAM RESEARCH CORPORATION;MARAKHTANOV, ALEXEI;DHINDSA, RAJINDER