LIQUID LEVEL GAUGE AND LIQUID RAW MATERIAL VAPORIZATION DEVICE

摘要

[Problem] To provide a liquid level gauge and a liquid raw material vaporization device with which the flow rate-dependence of the time for detecting a switch from a liquid phase to a vapor phase is reduced, and the detection time shortened. [Solution] The present invention is provided with a chamber 2 for holding a liquid raw material, at least one protective tube 3 housing a resistance temperature device for detecting the liquid level L1 within the chamber 2, and a flow rate control device 4 for controlling the flow rate at which a gas flowing out from the chamber 2 is supplied. The protective tubes 3 are secured inserted in the horizontal direction through a side wall 2a of the chamber 2.