| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint method that prevents interruption of a job sequence and has advantage in productivity.SOLUTION: An imprint method in which a pattern formed to a mold is transferred to a resin on a substrate, comprises: a holding step of holding the mold by using mold holding means; a curing step of curing a resin on the substrate while contacting a pattern region of the mold with the resin on the substrate; a releasing step of releasing the contacted mold from the resin; a detection step of detecting the deviation of mold relative to a predetermined position; a supporting step of cancelling the holding of the mold and supporting the mold by using mold conveying means; and a moving step of moving the mold of which the deviation is detected in a state of making the mold supported by the mold conveying means face to the mold holding means.SELECTED DRAWING: Figure 2B |
