| 发明名称 |
熱板温度補正方法、熱板駆動装置、及び基板加熱装置 |
| 摘要 |
|
| 申请公布号 |
JP5918637(B2) |
申请公布日期 |
2016.05.18 |
| 申请号 |
JP20120138629 |
申请日期 |
2012.06.20 |
| 申请人 |
ラピスセミコンダクタ株式会社 |
发明人 |
服部 恒司 |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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