Method of making contact posts for a microelectromechanical device

摘要

A device 20 includes a substrate 22 coupled with a substrate 24 such that a volume 32 is formed between the substrates 22, 24. Contact posts 48, 50 on the substrate 22 and a cantilever beam structure 36 on the substrate 24 are located within the volume 32. The cantilever beam structure has a conductive trace 38 that is selectively contactable with the contact posts 48, 50 to yield a microelectromechanical (MEMS) switch within the volume 32. Fabrication methodology for making the contact posts 48, 50 entails forming post protrusions 68, 70 on the substrate 22 and shaping post protrusions 68, 70 so that they acquire a rounded shape. Input and output signal lines 42, 44 are constructed such that respective portions of input and output signal lines 42, 44 overly corresponding post protrusions 68, 70 and take on the shape of post protrusions 68, 70.

主权项

1. A method of making a solid contact post for a microelectromechanical device comprising:
providing a first substrate; forming a solid post protrusion extending from said first substrate by depositing a thin film on said first substrate and selectively removing a portion of said thin film from said first substrate to form said solid post protrusion from the non-removed portion of said thin film, wherein said solid post protrusion is in direct contact with the first substrate such that there is no gap or other material between the first substrate and the solid post protrusion; shaping said solid post protrusion to acquire a rounded shape; and producing a solid contact post exhibiting said rounded shape by overlying said solid post protrusion with a portion of a signal line, said produced solid contact post having no internal cavity formed therein and having no gaps formed in said portion of said signal line overlying said solid post protrusion, said produced solid contact post serving with a selectively contactable conductive trace to actuate the microelectromechanical device; providing a second substrate; forming a cantilever beam structure on said second substrate, said cantilever beam structure having the conductive trace positioned thereon; and coupling said second substrate with said first substrate to form a volume between said first and second substrates, said solid contact post on said first substrate and said cantilever beam structure on said second substrate being located within said volume.