ELECTRON MICROSCOPE AND ELEMENT MAPPING IMAGE GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope and an element mapping image generation method, capable of obtaining a highly accurate element map while restraining the deterioration of a sample.SOLUTION: An electron microscope 1 includes: an acquisition unit 102 which acquires an electron microscope image of a sample S having a plurality of identical patterns and the spectrum of each pixel of the electron microscope image; and an element map generation unit 104 which generates the element mapping image of the sample S by adding the spectra of pixels in the plurality of regions of an identical size included in the electron microscope image.SELECTED DRAWING: Figure 1