发明名称 PRODUCTION METHOD OF MOLD, MOLD, PRODUCTION METHOD OF FILM, AND FILM
摘要 PROBLEM TO BE SOLVED: To provide a production method for obtaining a mold with fewer defects, by which aggregates in a resist liquid can be efficiently removed.SOLUTION: A production method of a mold is provided, including the following steps: step A of settling aggregates in a resist liquid by centrifugal force; step B of collecting a supernatant of the resist liquid obtained in step A in which the aggregates are settled; step C of filtering the supernatant obtained in step B to obtain a purified resist liquid; step D of applying the purified resist liquid obtained in step C to a surface of a mold base material; and step E of forming a pattern on the surface of the mold base material by etching.SELECTED DRAWING: None
申请公布号 JP2016078266(A) 申请公布日期 2016.05.16
申请号 JP20140209644 申请日期 2014.10.14
申请人 MITSUBISHI RAYON CO LTD 发明人 YAMADA NAOKO;KOSHITOUGE HARUKI
分类号 B29C33/38;C08J3/02;G03F7/38;H01L51/50;H05B33/02 主分类号 B29C33/38
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