发明名称 |
PRODUCTION METHOD OF MOLD, MOLD, PRODUCTION METHOD OF FILM, AND FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a production method for obtaining a mold with fewer defects, by which aggregates in a resist liquid can be efficiently removed.SOLUTION: A production method of a mold is provided, including the following steps: step A of settling aggregates in a resist liquid by centrifugal force; step B of collecting a supernatant of the resist liquid obtained in step A in which the aggregates are settled; step C of filtering the supernatant obtained in step B to obtain a purified resist liquid; step D of applying the purified resist liquid obtained in step C to a surface of a mold base material; and step E of forming a pattern on the surface of the mold base material by etching.SELECTED DRAWING: None |
申请公布号 |
JP2016078266(A) |
申请公布日期 |
2016.05.16 |
申请号 |
JP20140209644 |
申请日期 |
2014.10.14 |
申请人 |
MITSUBISHI RAYON CO LTD |
发明人 |
YAMADA NAOKO;KOSHITOUGE HARUKI |
分类号 |
B29C33/38;C08J3/02;G03F7/38;H01L51/50;H05B33/02 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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