NEAR FIELD MEASUREMENT METHOD AND NEAR FIELD OPTICAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a near field measurement method and near field microscope that prevent a deviation of a position possible to generate between a near field measurement planned area and a near filed measurement area beforehand, and enable the near field measurement at a proper position.SOLUTION: A near field measurement method (S10) according to the present invention comprises the processes of: inserting a near field probe into an optical axis of an objective lens (S12); aligning a center of a top end of a fiber optic with a focal point of the objective lens (S14); aligning a focus of the objective lens with a height position of a bottom end of the fiber optic (S16); determining a center position of the bottom end of the fiber optic on a microscopic measurement image in a state where the focus of the objective lens is aligned with the height position of the bottom end of the fiber optic (S18); and computing an amount of deviation between the focal point of the objective lens and a position of a mark (S20). The near field measurement method obtains an amount of deviation from a center of the top end of the fiber optic to a center of the bottom end according to an attachment way of the fiber optic.SELECTED DRAWING: Figure 4