| 摘要 |
The present invention relates to a vacuum pump for a vacuum absorption apparatus and, more specifically, to a vacuum pump for a vacuum absorption apparatus, which provides regular vacuum pressure to enable the vacuum absorption apparatus to absorb a glass panel, a wafer panel or the like, adjusts the vacuum pressure according to a size and a thickness of a workpiece including the panel to prevent deformation of the workpiece and also easily sets the workpiece. According to an embodiment of the present invention, the vacuum pump for a vacuum absorption apparatus comprises: a discharge panel receiving and discharging air, cutting oil and chips remaining within the vacuum absorption apparatus; a vacuum generation unit configured in an upper part of the discharge panel, sucking the air remaining within the vacuum absorption apparatus to make the state of the vacuum absorption apparatus convert into a vacuum state and adjusting the vacuum pressure to regulate the internal vacuum pressure of the vacuum absorption apparatus; a support plate coupled to the discharge panel and the vacuum generation unit by a coupling unit to integrate the discharge panel with the vacuum generation unit; and a manipulation plate coupled to an upper part of the vacuum generation unit to perform a control operation for driving the vacuum generation unit or not, and performing a control operation for regulating the vacuum pressure with a vacuum pressure gauge displaying the vacuum pressure generated by the vacuum generation unit. |
