发明名称 POLISHING METHOD AND COMPOSITION FOR POLISHING
摘要 Provided is a method for polishing a material that has a Vickers hardness of 1,500 Hv or more. This polishing method comprises: a step for performing preliminary polishing with use of a composition for preliminary polishing, which contains abrasive grains APRE; and a step for performing finish polishing with use of a composition for finish polishing, which contains abrasive grains AFIN that have a lower hardness than the abrasive grains APRE.
申请公布号 WO2016072370(A1) 申请公布日期 2016.05.12
申请号 WO2015JP80843 申请日期 2015.10.30
申请人 FUJIMI INCORPORATED 发明人 TAKAHASHI, SHUHEI;TOMATSU, MASATOSHI
分类号 B24B37/00;B24B1/00;C09G1/02;C09K3/14;H01L21/304 主分类号 B24B37/00
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