发明名称 |
POLISHING METHOD AND COMPOSITION FOR POLISHING |
摘要 |
Provided is a method for polishing a material that has a Vickers hardness of 1,500 Hv or more. This polishing method comprises: a step for performing preliminary polishing with use of a composition for preliminary polishing, which contains abrasive grains APRE; and a step for performing finish polishing with use of a composition for finish polishing, which contains abrasive grains AFIN that have a lower hardness than the abrasive grains APRE. |
申请公布号 |
WO2016072370(A1) |
申请公布日期 |
2016.05.12 |
申请号 |
WO2015JP80843 |
申请日期 |
2015.10.30 |
申请人 |
FUJIMI INCORPORATED |
发明人 |
TAKAHASHI, SHUHEI;TOMATSU, MASATOSHI |
分类号 |
B24B37/00;B24B1/00;C09G1/02;C09K3/14;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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