| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor allowing stable voltage output even if the temperature changes.SOLUTION: The thin-film-type hydrogen gas sensor includes a resistor made of a platinum thin film on the top surface of an insulator substrate, and detects the concentration change of hydrogen gas by detecting the change in resistance of the resistor. The gas sensor includes: a first resistor whose resistance changes due to contact with the hydrogen gas; and a second resistor whose resistance changes less than the first resistor due to contact with the hydrogen gas. By connecting the first resistor to the second resistor in series, a thin-film-type hydrogen gas sensor for detecting the concentration change of the hydrogen gas on the basis of the voltage output due to the difference between the resistance values is provided.SELECTED DRAWING: Figure 8 |
