| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing pad that includes an elastic resin sheet having high durability while a cut groove is formed at a polishing surface thereof.SOLUTION: The cut groove 80 having a V-shaped cross section is formed at the polishing surface Sp of the elastic resin sheet 2 that is included in the polishing pad. When a direction of an inclined part 12 of a bubble 10, which extends toward the polishing surface Sp, is defined as a first direction, the cut groove 80 is sectioned into a first slope Sc1 positioned on a near side along the first direction and a second slope Sc2 positioned on a further side along the first direction. An angle &thetas;2 defined by the second slope Sc2 relative to the polishing surface Sp is smaller than an angle &thetas;3 defined by the inclined part 12 of the bubble 10 relative to the polishing surface Sp. |
