OPERATION MONITORING APPARATUS OF FAN FILTER UNIT

摘要

The present invention relates to an apparatus for monitoring a fan filter unit. The apparatus for monitoring a fan filter unit comprises: a support; a propeller coupled with the support by a rotating shaft and operated by the rotation of the fan filter unit; a magnet provided in the propeller; and a hole sensor detecting the revolution of the magnet and outputting a pulse signal. Therefore, the apparatus for monitoring a fan filter unit can check the operation state of the fan filter unit by a propeller stopped or rotating forward and backward according to air flow caused by the operation of the fan filter unit and the magnet and the hole sensor installed in the propeller.