发明名称 STORAGE CONTAINER
摘要 A storage container in which a uniform flow velocity of the purge gas can be achieved is provided. A storage container 1 is provided with a plurality of stages of storage units 5 each having an accommodating region S to accommodate an article and includes: a supply portion 10 configured to supply a purge gas; a duct portion 22 configured to communicate with one another throughout the plurality of storage units 5 and serve as a flow path for the purge gas supplied from the supply portion 10; and an introducing portion 24 configured to communicably connect the duct portion 22 with the accommodating region S and introduce the purge gas to the accommodating region S. In the flow path for the purge gas in the duct portion 22, a diffusion member 32 is arranged.
申请公布号 EP3018530(A1) 申请公布日期 2016.05.11
申请号 EP20140819677 申请日期 2014.06.05
申请人 MURATA MACHINERY, LTD. 发明人 GAMBE MASAHIKO
分类号 G03F1/66;B65D85/86;H01L21/027;H01L21/673 主分类号 G03F1/66
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