发明名称 PORE-FREE CERAMIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide: processes for producing a pore-free ceramic having a high modulus of elasticity and a low coefficient of thermal expansion even with relatively large thicknesses or volumes from a solid material by ceramization; and such a ceramic.SOLUTION: The invention provides a pore-free ceramic component comprising SiOof 40-55 mass%, AlOof 21-35 mass%, MgO of 10-15 mass%, TiOof 1-11 mass%, and ZrOof 1-8 mass%. Also provided are processes of producing the same.SELECTED DRAWING: Figure 1
申请公布号 JP2016069274(A) 申请公布日期 2016.05.09
申请号 JP20150188414 申请日期 2015.09.25
申请人 SCHOTT AG 发明人 SCHREDER BIANCA;HANSEN STEFANIE;WOELFEL UTE
分类号 C04B35/18;C03B32/02;C03C10/08;G03F7/20;H01L21/683 主分类号 C04B35/18
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