| 摘要 |
PROBLEM TO BE SOLVED: To provide an attachment removal method capable of efficiently removing a hard attachment, by reducing damage of a jig, in the attachment removal method for removing the attachment attached to the jig in a film forming process.SOLUTION: An injection material 1 having an abrasive material 11 on a surface of a core 10 having elasticity, is injected at a predetermined inclination angle α from the oblique direction into a surface 100a of a jig 100. When the injection material 1 collides with an attachment 110, the core 10 is elastically deformed, and the abrasive material 11 is displaced in the surface direction of the surface 100a of the jig 100 in response to deformation of the core 10. When the abrasive material 11 is displaced in the surface direction, the attachment 110 is rubbed in the surface direction by the abrasive material 11, so that the attachment 110 is removed.SELECTED DRAWING: Figure 3 |
