| 摘要 |
PROBLEM TO BE SOLVED: To propose a bolometric detector that has a large absorption effective area.SOLUTION: A bolometric detector of wavelengths in an LWIR range includes: a substrate; a membrane that is suspended above the substrate by a supporting element; an absorbing element that comprises several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; and a thermometric element that includes at least one thermometric material. The membrane includes the upper metal element of each MIM structure, and at least one portion of the thermometric material and the dielectric element. The upper metal elements of at least two MIM structures have different dimensions relatively to each other in a main plane of the membrane, and each dielectric element of the MIM structure includes at least one of following materials having vibration modes in the LWIR range:AlO, AlN, and TiO.SELECTED DRAWING: Figure 5 |
