DEVICE AND METHOD OF PURIFYING GAS, AND METHOD FOR REGENERATING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for purifying a process gas mixture such as a cryogenic gas.SOLUTION: In a method and a device of this invention, impurity components of a mixture are removed by reverse sublimation due to cryogenic condensation. A gas mixture is cooled to a temperature sufficiently lower than a condensation temperature of the impurities by direct exchange between the gas mixture and a cooling source 24 disposed in a first region of the device 10. The reversely-sublimated or frozen impurities are collected near a surface of a cooling region, and transferred to a part of the device defining an impurity accommodation region. The purified gas is transferred from the impurity accommodation region, selectively passed through a filter 34, then passed through a counterflow heat exchanger 26, and finally reaches a gas outlet 16 of a room temperature. A method for removing the collected impurities and regenerating the device is further disclosed.SELECTED DRAWING: Figure 2A