发明名称 |
NONPOROUS MOLDED ARTICLE FOR POLISHING LAYER, POLISHING PAD, AND POLISHING METHOD |
摘要 |
Provided is a nonporous molded article for a polishing layer which is a nonporous molded article of a thermoplastic polyurethane, wherein the thermoplastic polyurethane has a maximum loss tangent (tanδ) within a range of -70 to -50˚C of 4.00 x 10-2 or less. Preferably, the thermoplastic polyurethane is obtained by polymerization of a polymer diol having a number-average molecular weight of 650 to 1400, an organic diisocyanate, and a chain extender, and the thermoplastic polyurethane contains 5.7 to 6.5 mass% of nitrogen derived from the isocyanate groups in the organic diisocyanate. |
申请公布号 |
WO2016067588(A1) |
申请公布日期 |
2016.05.06 |
申请号 |
WO2015JP05371 |
申请日期 |
2015.10.27 |
申请人 |
KURARAY CO., LTD. |
发明人 |
KADOWAKI, KIYOFUMI;KATO, SHINYA;OKAMOTO, CHIHIRO;KATO, MITSURU;TAKEGOSHI, MINORI |
分类号 |
B24B37/24;B24B37/22;H01L21/304 |
主分类号 |
B24B37/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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