发明名称 NONPOROUS MOLDED ARTICLE FOR POLISHING LAYER, POLISHING PAD, AND POLISHING METHOD
摘要 Provided is a nonporous molded article for a polishing layer which is a nonporous molded article of a thermoplastic polyurethane, wherein the thermoplastic polyurethane has a maximum loss tangent (tanδ) within a range of -70 to -50˚C of 4.00 x 10-2 or less. Preferably, the thermoplastic polyurethane is obtained by polymerization of a polymer diol having a number-average molecular weight of 650 to 1400, an organic diisocyanate, and a chain extender, and the thermoplastic polyurethane contains 5.7 to 6.5 mass% of nitrogen derived from the isocyanate groups in the organic diisocyanate.
申请公布号 WO2016067588(A1) 申请公布日期 2016.05.06
申请号 WO2015JP05371 申请日期 2015.10.27
申请人 KURARAY CO., LTD. 发明人 KADOWAKI, KIYOFUMI;KATO, SHINYA;OKAMOTO, CHIHIRO;KATO, MITSURU;TAKEGOSHI, MINORI
分类号 B24B37/24;B24B37/22;H01L21/304 主分类号 B24B37/24
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