| 发明名称 |
MEMS SWITCH AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
A microelectromechanical systems (MEMS) switch includes: a signal line disposed on a substrate; a dielectric member attached to the substrate; support fixtures disposed on the substrate at opposing sides of the signal line; and a membrane having ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement. |
| 申请公布号 |
US2016126045(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201514864455 |
申请日期 |
2015.09.24 |
| 申请人 |
Samsung Electro-Mechanics Co., Ltd. |
发明人 |
CHEON Seong Jong |
| 分类号 |
H01H59/00;H01H49/00 |
主分类号 |
H01H59/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical systems (MEMS) switch comprising:
a signal line disposed on a substrate; a dielectric member attached to the signal line; support fixtures disposed on the substrate at opposing sides of the signal line; and a membrane comprising ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement. |
| 地址 |
Suwon-si KR |
