发明名称 PIN FOR SUPPORTING A SUBSTRATE
摘要 A pin for supporting a substrate comprises a body unit and a contact unit which is provided in an end portion of the body unit to be in contact with a substrate, and has an O-ring shape to minimize a contact area with the substrate. Therefore, the pin for supporting a substrate can minimize damage to the substrate.
申请公布号 KR20160047753(A) 申请公布日期 2016.05.03
申请号 KR20140144035 申请日期 2014.10.23
申请人 SEMES CO., LTD. 发明人 CHUNG, YEON MIN;KIM, JIN SUNG
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址
您可能感兴趣的专利