Tunable diplexers in three-dimensional (3D) integrated circuits (IC) (3DIC) and related components and methods

摘要

Tunable diplexers in three-dimensional (3D) integrated circuits (IC) (3DIC) are disclosed. In one embodiment, the tunable diplexer may be formed by providing one of either a varactor or a variable inductor in the diplexer. The variable nature of the varactor or the variable inductor allows a notch in the diplexer to be tuned so as to select a band stop to eliminate harmonics at a desired frequency as well as control the cutoff frequency of the pass band. By stacking the elements of the diplexer into three dimensions, space is conserved and a variety of varactors and inductors are able to be used.

主权项

1. A three-dimensional (3D) integrated circuit (IC) (3DIC), comprising:
a first tier comprising at least one inductor, wherein the at least one inductor comprises a through substrate via inductor, wherein the through substrate via inductor comprises a high Q inductor, wherein Q is greater than or equal to thirty at 1 GHz; and a second tier comprising at least one varactor coupled to the at least one inductor, the at least one inductor and the at least one varactor collectively forming a tunable diplexer.