Exposure method, exposure apparatus, and method of manufacturing device

摘要

An exposure method comprises a calculation step of calculating a correction amount of a correction unit which corrects a change in imaging characteristics of a projection optical system based on at least one of parameters including a numerical aperture and effective light source of an illumination optical system, a numerical aperture of the projection optical system, and a size and pitch of a pattern, and an amount of change in environment condition in the projection optical system; and a correction step of making the correction unit operate in accordance with the correction amount calculated in the calculation step.

主权项

1. An exposure method of illuminating a mask, on which a pattern is formed, using an illumination optical system, and projecting an image of a pattern of the illuminated mask onto a substrate through a projection optical system, the method comprising:
a calculation step of calculating a correction amount of a correction unit which corrects imaging characteristics of the projection optical system based on an amount of change in an environment condition in the projection optical system and a coefficient defining a relationship between the amount of change in the environment condition and the correction amount of the correction unit, wherein the coefficient is a quadratic function of a numerical aperture of the illumination optical system and a numerical aperture of the projection optical system; and a correction step of making the correction unit operate in accordance with the correction amount calculated in the calculation step, wherein the calculation step includes: a coefficient value calculating step of calculating a value of the coefficient by substituting values of the numerical aperture of the illumination optical system and the numerical aperture of the projection optical system into the quadratic function; and a correction amount calculation step of calculating the correction amount of the correction unit using the amount of change in the environment condition and the calculated value of the coefficient.