| 发明名称 | Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device | ||
| 摘要 | A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively. | ||
| 申请公布号 | US9331606(B2) | 申请公布日期 | 2016.05.03 |
| 申请号 | US201113821701 | 申请日期 | 2011.09.09 |
| 申请人 | Commissariat a l'energie atomique et aux energies alternatives | 发明人 | Hentz Sebastien;Andreucci Philippe;Colinet Eric;Duraffourg Laurent;Labarthe Sebastien |
| 分类号 | G01L1/00;G01B7/16;H02N2/18;H03H9/02;H03H9/24;B81B3/00;H02N2/00 | 主分类号 | G01L1/00 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A device with a suspended beam and piezoresistive means of detecting displacement of the beam, the device comprising: a support comprising an approximately plane surface; a beam which is suspended from the support and capable of moving parallel to the plane of the surface of the support; and means of detecting displacement of the beam, comprising at least two approximately straight piezoresistive strain gauges suspended from the support, the two strain gauges not being in line with each other, in which the beam is suspended from the support through the detection means and is thus not anchored to the support directly, and in which said at least two strain gauges are located on two opposite lateral faces of the beam respectively. | ||
| 地址 | Paris FR | ||