| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamination type piezoelectric element in which an oxygen hole is prevented from being generated in a piezoelectric layer even if used in a severe DC environment, a piezoelectric actuator, and a mass flow controller with the same.SOLUTION: A lamination type piezoelectric element 1 includes: a piezoelectric layer 11; a laminate 13 in which a first internal electrode layer 121 and a second internal electrode layer 122 are laminated; an external electrode 15 (conductor layer) that is provided on a side surface of the laminate 13; and a ceramic coating layer 14 that is provided on the side surface of the laminate 13 excluding a region in which the external electrode 15 is provided. Between at least one of an outer edge of the first internal electrode layer 121 and an outer edge of the second internal electrode layer 122 and the ceramic coating layer 14, a cavity part 16 is provided, which extends along at least one of the outer edge of the first internal electrode layer 121 and the outer edge of the second internal electrode layer 122.SELECTED DRAWING: Figure 1 |
